半導体特性の自律接触マッピングのための自己教師ありロボットシステム

原文アブストラクト

Integrating robotically driven contact-based material characterization techniques into self-driving laboratories can enhance measurement quality, reliability, and throughput. While deep learning models support robust autonomy, current methods lack reliable pixel-precision positioning and require extensive labeled data. To overcome these challenges, we propose an approach for building self-supervised autonomy into contact-based robotic systems that teach the robot to follow domain expert measurement principles at high-throughputs. Firstly, we design a vision-based, self-supervised convolutional neural network (CNN) architecture that uses differentiable image priors to optimize domain-specific objectives, refining the pixel precision of predicted robot contact poses by 20.0% relative to existing approaches. Secondly, we design a reliable graph-based planner for generating distance-minimizing paths to accelerate the robot measurement throughput and decrease planning variance by 6x. We demonstrate the performance of this approach by autonomously driving a 4-degree-of-freedom robotic probe for 24 hours to characterize semiconductor photoconductivity at 3,025 uniquely predicted poses across a gradient of drop-casted perovskite film compositions, achieving throughputs over 125 measurements per hour. Spatially mapping photoconductivity onto each drop-casted film reveals compositional trends and regions of inhomogeneity, valuable for identifying manufacturing process defects. With this self-supervised CNN-driven robotic system, we enable high-precision and reliable automation of contact-based characterization techniques at high throughputs, thereby allowing the measurement of previously inaccessible yet important semiconductor properties for self-driving laboratories.